Adisorn Buranawong. (2010) Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method /. King Mongkut's University of Technology Thonburi,:ม.ป.ท.Adisorn Buranawong. 2010. Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method /. ม.ป.ท.:King Mongkut's University of Technology Thonburi,;Adisorn Buranawong. Deposition of titanium aluminium nitride thin film by reactive unbalanced magnetron sputtering method /. ม.ป.ท.:King Mongkut's University of Technology Thonburi, 2010. Print.