Jirawan Saenton และ Sukkaneste Tungasmita. (2009) Growth of multifunctional zirconium nitrde thin films by reactive dc magnetron sputtering /. Chulalongkorn University,:ม.ป.ท.Jirawan Saenton และ Sukkaneste Tungasmita. 2009. Growth of multifunctional zirconium nitrde thin films by reactive dc magnetron sputtering /. ม.ป.ท.:Chulalongkorn University,;Jirawan Saenton และ Sukkaneste Tungasmita. Growth of multifunctional zirconium nitrde thin films by reactive dc magnetron sputtering /. ม.ป.ท.:Chulalongkorn University, 2009. Print.